Abstract
In this paper, we propose a modified channel-stacked array with a layer selection by multi-level operation (LSM) and a new string select transistors (SSTs) threshold voltage (Vth) setting method that all the SSTs on each layer are set to target Vth by using boosted body operation. To verify the validity of the new method in LSM, TCAD simulations are performed. It is verified that the Vth values of SSTs are set to the target Vth values by the new method. Moreover, memory operations are examined in TCAD simulation by the new method. As a result, stable memory operations are obtained successfully without the interference between stacked layers.
Original language | English |
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Pages (from-to) | 3386-3389 |
Number of pages | 4 |
Journal | Journal of Nanoscience and Nanotechnology |
Volume | 17 |
Issue number | 5 |
DOIs | |
State | Published - 2017 |
Bibliographical note
Publisher Copyright:© Copyright 2017 American Scientific Publishers.
Keywords
- 3D Stacked NAND Flash Memory, Layer Selection by Multi-Level Operation (LSM).