@article{8396f6448eb7442493bcd097056e0643,
title = "Studies of environmentally friendly solvent-based developers",
keywords = "Environmentally friendly, Photolithography, Silicone fluids, Supercritical CO",
author = "Ouyang, {Christine Y.} and Lee, {Jin Kyun} and Ober, {Christopher K.}",
year = "2011",
doi = "10.2494/photopolymer.24.239",
language = "English",
volume = "24",
pages = "239--240",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "2",
}