Abstract
It has been found that the formation of a ferroelectric phase for the SrBi2Ta2O9 (SBT) thin films derived from sol-gel solution is dependent on the oxygen pressure during the heat-treatment process. Under an elevated oxygen pressure as high as 30 atm, the heat-treatment temperature inducing the ferroelectric SBT phase can be lowered to 650°C. Those films processed at 650°C present satisfactory ferroelectric properties, that is, the remanent polarization (Pr) is 5.0 μC/cm2, and the coercive field (Ec) is 43 kV/cm with 5 V application.
Original language | English |
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Pages (from-to) | 2791-2792 |
Number of pages | 2 |
Journal | Japanese Journal of Applied Physics |
Volume | 39 |
Issue number | 5 A |
DOIs | |
State | Published - 1 May 2000 |
Keywords
- Ferroelectric
- Pressure effect
- SBT (SrBiTaO)
- Sol-gel process
- Thin film