@inproceedings{427a629e00804f15b7546b78c74d5e42,
title = "Microfabricated heteroepitaxial oxide structures on silicon for bolometric arrays",
abstract = "The microfabrication of the free standing perovskite La0.67(Sr, Ca)0.33MnO3 (LSCMO) thin films on silicon substrates with epitaxial grown oxide buffer layers was investigated for microbolometer application. The Ar ion etching (IBE) rate of LSCMO films was found to be 16 nm/min. Using pre-annealed photoresist patterning, the free standing LSCMO pixels on epitaxial buffer oxide membrane were realized by the IBE and SF 6 inductive coupled plasma (ICP) etching process. These results can be utilized as thermally isolated membrane for heteroepitaxial oxide structures.",
keywords = "Bolometer, La(Sr,Ca)Mno (LSCMO), Membrane, Micromachining, Si",
author = "Kim, {Joo Hyung} and Grishin, {Alexander M.}",
year = "2005",
language = "English",
isbn = "0976798522",
series = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
pages = "521--524",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 Technical Proceedings",
note = "2005 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2005 ; Conference date: 08-05-2005 Through 12-05-2005",
}