Mechanism of Vfb roll-off with high work function metal gate and low temperature oxygen incorporation to achieve PMOS band edge work function

S. C. Song, C. S. Park, J. Price, C. Burham, R. Choi, H. C. Wen, K. Choi, H. H. Tseng, B. H. Lee, R. Jammy

Research output: Contribution to journal › Conference article › peer-review

37 Scopus citations

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Engineering

Material Science