Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns

Yongjun Lim; Kwan Jung Oh; Jaehyeung Park

doi:10.1109/ICTC55196.2022.9952707

Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns

Yongjun Lim, Kwan Jung Oh, Jaehyeung Park

Electronics and Telecommunications Research Institute

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Binarization is required to quantize data values in computer-generated holograms especially designed for lithographic process. However, there are some unwanted quality issues caused by binarization in reconstructing computer-generated holograms. In this paper, we experimentally show spectral noise components caused by the binarization.

Original language	English
Title of host publication	ICTC 2022 - 13th International Conference on Information and Communication Technology Convergence
Subtitle of host publication	Accelerating Digital Transformation with ICT Innovation
Publisher	IEEE Computer Society
Pages	803-805
Number of pages	3
ISBN (Electronic)	9781665499392
DOIs	https://doi.org/10.1109/ICTC55196.2022.9952707
State	Published - 2022
Event	13th International Conference on Information and Communication Technology Convergence, ICTC 2022 - Jeju Island, Korea, Republic of Duration: 19 Oct 2022 → 21 Oct 2022

Publication series

Name	International Conference on ICT Convergence
Volume	2022-October
ISSN (Print)	2162-1233
ISSN (Electronic)	2162-1241

Conference

Conference	13th International Conference on Information and Communication Technology Convergence, ICTC 2022
Country/Territory	Korea, Republic of
City	Jeju Island
Period	19/10/22 → 21/10/22

Bibliographical note

Publisher Copyright:
© 2022 IEEE.

Keywords

binarization
computer-generated holograms
spectrum

Access to Document

10.1109/ICTC55196.2022.9952707

Cite this

Lim, Y., Oh, K. J., & Park, J. (2022). Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns. In ICTC 2022 - 13th International Conference on Information and Communication Technology Convergence: Accelerating Digital Transformation with ICT Innovation (pp. 803-805). (International Conference on ICT Convergence; Vol. 2022-October). IEEE Computer Society. https://doi.org/10.1109/ICTC55196.2022.9952707

Lim, Yongjun ; Oh, Kwan Jung ; Park, Jaehyeung. / Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns. ICTC 2022 - 13th International Conference on Information and Communication Technology Convergence: Accelerating Digital Transformation with ICT Innovation. IEEE Computer Society, 2022. pp. 803-805 (International Conference on ICT Convergence).

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title = "Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns",

abstract = "Binarization is required to quantize data values in computer-generated holograms especially designed for lithographic process. However, there are some unwanted quality issues caused by binarization in reconstructing computer-generated holograms. In this paper, we experimentally show spectral noise components caused by the binarization.",

keywords = "binarization, computer-generated holograms, spectrum",

author = "Yongjun Lim and Oh, {Kwan Jung} and Jaehyeung Park",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 13th International Conference on Information and Communication Technology Convergence, ICTC 2022 ; Conference date: 19-10-2022 Through 21-10-2022",

year = "2022",

doi = "10.1109/ICTC55196.2022.9952707",

language = "English",

series = "International Conference on ICT Convergence",

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Lim, Y, Oh, KJ & Park, J 2022, Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns. in ICTC 2022 - 13th International Conference on Information and Communication Technology Convergence: Accelerating Digital Transformation with ICT Innovation. International Conference on ICT Convergence, vol. 2022-October, IEEE Computer Society, pp. 803-805, 13th International Conference on Information and Communication Technology Convergence, ICTC 2022, Jeju Island, Korea, Republic of, 19/10/22. https://doi.org/10.1109/ICTC55196.2022.9952707

Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns. / Lim, Yongjun; Oh, Kwan Jung; Park, Jaehyeung.
ICTC 2022 - 13th International Conference on Information and Communication Technology Convergence: Accelerating Digital Transformation with ICT Innovation. IEEE Computer Society, 2022. p. 803-805 (International Conference on ICT Convergence; Vol. 2022-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Lim Y, Oh KJ, Park J. Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns. In ICTC 2022 - 13th International Conference on Information and Communication Technology Convergence: Accelerating Digital Transformation with ICT Innovation. IEEE Computer Society. 2022. p. 803-805. (International Conference on ICT Convergence). doi: 10.1109/ICTC55196.2022.9952707

Measurement of Spectral Noise Caused by Binarization in Computer-Generated Holograms Desgined for Lithographic Patterns

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