Inductively coupled plasma reactive ion etching of Co2MnSi magnetic films for magnetic random access memory

Byul Shin, Hyun Park Ik, Won Chung Chee

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish
Pages (from-to)377-380
Number of pages4
JournalStudies in Surface Science and Catalysis
Volume159
DOIs
StatePublished - 2006

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