Free-standing epitaxial La 1-x (Sr,Ca) xMn O 3 membrane on Si for uncooled infrared microbolometer

J. H. Kim; A. M. Grishin

doi:10.1063/1.1996845

Free-standing epitaxial La _1-x (Sr,Ca) _xMn O ₃ membrane on Si for uncooled infrared microbolometer

J. H. Kim, A. M. Grishin

KTH Royal Institute of Technology

Research output: Contribution to journal › Article › peer-review

47 Scopus citations

Abstract

Ar ion beam etching and inductively coupled S F6 and C4 F8 plasma-etching processes have been employed to fabricate free standing membrane from the heteroepitaxial La1-x (Sr,Ca)x Mn O3 (50 nm) Bi4 Ti3 O12 (100 nm) Ce O2 (40 nm) YSZ (30 nm) film structure pulsed laser deposited on Si(001) wafer. We demonstrate feasibility to use epitaxial colossal magnetoresistive manganite film as thermally isolated self-supporting membrane for uncooled infrared microbolometer applications.

Original language	English
Article number	033502
Journal	Applied Physics Letters
Volume	87
Issue number	3
DOIs	https://doi.org/10.1063/1.1996845
State	Published - 18 Jul 2005
Externally published	Yes

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abstract = "Ar ion beam etching and inductively coupled S F6 and C4 F8 plasma-etching processes have been employed to fabricate free standing membrane from the heteroepitaxial La1-x (Sr,Ca)x Mn O3 (50 nm) Bi4 Ti3 O12 (100 nm) Ce O2 (40 nm) YSZ (30 nm) film structure pulsed laser deposited on Si(001) wafer. We demonstrate feasibility to use epitaxial colossal magnetoresistive manganite film as thermally isolated self-supporting membrane for uncooled infrared microbolometer applications.",

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Free-standing epitaxial La _1-x (Sr,Ca) _xMn O ₃ membrane on Si for uncooled infrared microbolometer

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