TY - JOUR
T1 - Flexible transparent oxide electrode on regenerated cellulose
AU - Lim, Byung Wook
AU - Kim, Young Baek
AU - Song, Sang In
AU - Lee, Young Jun
AU - Kim, Joo Hyung
PY - 2014/10
Y1 - 2014/10
N2 - The demand for flexible transparent conducting oxides (TCOs) for optoelectronic applications, such as touch panels, flat panel displays, organic light-emitting diodes (OLEDs) and other mobile devices, has been increasing continuously. To produce flexible TCOs electrodes, amorphous ZnO-doped ITO (ZITO) films were deposited on flexible transparent cellulose, PES and glass substrates by RF sputtering using a single target (In2O3 50.7/ZnO 44.4/SnO2 4.9 mol%). With increasing oxygen ratio during ZITO film deposition, the sheet resistance increased linearly, whereas the carrier density decreased, which may be due to the rough surface of cellulose caused by the regeneration film process. The overall electrical performance of ZITO was found to be comparable to that of the other transparent substrates.
AB - The demand for flexible transparent conducting oxides (TCOs) for optoelectronic applications, such as touch panels, flat panel displays, organic light-emitting diodes (OLEDs) and other mobile devices, has been increasing continuously. To produce flexible TCOs electrodes, amorphous ZnO-doped ITO (ZITO) films were deposited on flexible transparent cellulose, PES and glass substrates by RF sputtering using a single target (In2O3 50.7/ZnO 44.4/SnO2 4.9 mol%). With increasing oxygen ratio during ZITO film deposition, the sheet resistance increased linearly, whereas the carrier density decreased, which may be due to the rough surface of cellulose caused by the regeneration film process. The overall electrical performance of ZITO was found to be comparable to that of the other transparent substrates.
KW - A. Electronic materials
KW - A. Oxides
KW - B. Sputtering
KW - C. X-ray diffraction
KW - D. Electrical properties
UR - http://www.scopus.com/inward/record.url?scp=84905902496&partnerID=8YFLogxK
U2 - 10.1016/j.materresbull.2014.04.040
DO - 10.1016/j.materresbull.2014.04.040
M3 - Article
AN - SCOPUS:84905902496
SN - 0025-5408
VL - 58
SP - 136
EP - 140
JO - Materials Research Bulletin
JF - Materials Research Bulletin
ER -