Fabrication and properties of trench-structured networked SnO 2 nanowire gas sensors

Sung Hyun Jung, Sun Woo Choi, Sang Sub Kim

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

Abstract

On the basis of on-chip trench structure, multiple-networked SnO 2 nanowire sensors are successfully fabricated by the use of the selective growth of SnO 2 nanowires and their entanglement nature. The sensing performance of the trench-structured SnO 2 nanowire sensors is investigated in terms of NO 2. The density of nanowire junctions is deliberately controlled via changing either the trench width or the time of nanowire growth. A model is proposed to provide a general rule for preparing trench-structured nanowire sensors of superior sensing performance.

Original languageEnglish
Pages (from-to)672-678
Number of pages7
JournalSensors and Actuators B: Chemical
Volume171-172
DOIs
StatePublished - Aug 2012

Keywords

  • Gas sensing
  • Nanowire
  • SnO
  • Trench

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