Effect of sol-gel precursors on the grain structure of PZT thin films

Y. T. Kwon; I. M. Lee; W. I. Lee; C. J. Kim; I. K. Yoo

doi:10.1016/S0025-5408(99)00068-9

Effect of sol-gel precursors on the grain structure of PZT thin films

Y. T. Kwon, I. M. Lee, W. I. Lee, C. J. Kim, I. K. Yoo

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

Three sol-gel solutions, namely, acetate-, 2-methoxyethoxide-, and 2-ethylhexanoate-based precursor solutions, were synthesized and utilized for the fabrication of ferroelectric lead zirconate titanate (PZT) thin films on Pt/Ti/SiO₂/Si substrates. The effect of these sol-gel precursors on the surface morphology, crystallographic phase, and ferroelectric properties of the PZT thin films is analyzed in this work. The PZT thin films prepared from the acetate-based precursor solution demonstrated homogeneous and dense grains, while those from the 2-methoxyethoxide and 2-ethylhexanoate systems exhibited large rosette structures on their surface. The correlation between the decomposition mechanism of the precursor and the formation of rosette structure in the sol-gel derived PZT films is discussed.

Original language	English
Pages (from-to)	749-760
Number of pages	12
Journal	Materials Research Bulletin
Volume	34
Issue number	5
DOIs	https://doi.org/10.1016/S0025-5408(99)00068-9
State	Published - 15 Mar 1999

Bibliographical note

Funding Information:
This work was supported by KOSEF 97-05-01-03-01-3 and Inha University 96/97 fund.

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title = "Effect of sol-gel precursors on the grain structure of PZT thin films",

abstract = "Three sol-gel solutions, namely, acetate-, 2-methoxyethoxide-, and 2-ethylhexanoate-based precursor solutions, were synthesized and utilized for the fabrication of ferroelectric lead zirconate titanate (PZT) thin films on Pt/Ti/SiO2/Si substrates. The effect of these sol-gel precursors on the surface morphology, crystallographic phase, and ferroelectric properties of the PZT thin films is analyzed in this work. The PZT thin films prepared from the acetate-based precursor solution demonstrated homogeneous and dense grains, while those from the 2-methoxyethoxide and 2-ethylhexanoate systems exhibited large rosette structures on their surface. The correlation between the decomposition mechanism of the precursor and the formation of rosette structure in the sol-gel derived PZT films is discussed.",

author = "Kwon, {Y. T.} and Lee, {I. M.} and Lee, {W. I.} and Kim, {C. J.} and Yoo, {I. K.}",

note = "Funding Information: This work was supported by KOSEF 97-05-01-03-01-3 and Inha University 96/97 fund.",

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doi = "10.1016/S0025-5408(99)00068-9",

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T1 - Effect of sol-gel precursors on the grain structure of PZT thin films

AU - Kwon, Y. T.

AU - Lee, I. M.

AU - Lee, W. I.

AU - Kim, C. J.

AU - Yoo, I. K.

N1 - Funding Information: This work was supported by KOSEF 97-05-01-03-01-3 and Inha University 96/97 fund.

PY - 1999/3/15

Y1 - 1999/3/15

N2 - Three sol-gel solutions, namely, acetate-, 2-methoxyethoxide-, and 2-ethylhexanoate-based precursor solutions, were synthesized and utilized for the fabrication of ferroelectric lead zirconate titanate (PZT) thin films on Pt/Ti/SiO2/Si substrates. The effect of these sol-gel precursors on the surface morphology, crystallographic phase, and ferroelectric properties of the PZT thin films is analyzed in this work. The PZT thin films prepared from the acetate-based precursor solution demonstrated homogeneous and dense grains, while those from the 2-methoxyethoxide and 2-ethylhexanoate systems exhibited large rosette structures on their surface. The correlation between the decomposition mechanism of the precursor and the formation of rosette structure in the sol-gel derived PZT films is discussed.

AB - Three sol-gel solutions, namely, acetate-, 2-methoxyethoxide-, and 2-ethylhexanoate-based precursor solutions, were synthesized and utilized for the fabrication of ferroelectric lead zirconate titanate (PZT) thin films on Pt/Ti/SiO2/Si substrates. The effect of these sol-gel precursors on the surface morphology, crystallographic phase, and ferroelectric properties of the PZT thin films is analyzed in this work. The PZT thin films prepared from the acetate-based precursor solution demonstrated homogeneous and dense grains, while those from the 2-methoxyethoxide and 2-ethylhexanoate systems exhibited large rosette structures on their surface. The correlation between the decomposition mechanism of the precursor and the formation of rosette structure in the sol-gel derived PZT films is discussed.

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U2 - 10.1016/S0025-5408(99)00068-9

DO - 10.1016/S0025-5408(99)00068-9

M3 - Article

AN - SCOPUS:0345633582

SN - 0025-5408

VL - 34

SP - 749

EP - 760

JO - Materials Research Bulletin

JF - Materials Research Bulletin

IS - 5

ER -

Effect of sol-gel precursors on the grain structure of PZT thin films

Abstract

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