Dense and smooth epitaxial BaTiO₃ thin films by the dipping-pyrolysis process

Dense and smooth BaTiO₃ thin films were prepared on SrTiO₃ (100) substrates by the dipping-pyrolysis process using a mixed precursor solution of barium and titanium naphthenates. Combination effects of prefiring [at 150-450°C in air or low oxygen partial pressure, p(O₂)] and final heat treatment [at 850°C in air or low p(O₂)] on preparation of BaTiO₃ thin films were examined. An epitaxial BaTiO₃ thin film with a dense and smooth surface consisting of nanosized grains about 70 nm was prepared by prefiring under low p(O₂) at 250°C and final heat treatment under low p (O₂) at 850°C.