Comparison of effective work function extraction methods using capacitance and current measurement techniques

Huang Chun Wen; Rino Choi; George A. Brown; Tim Böscke; Kenneth Matthews; Harlan R. Harris; Kisik Choi; Husam N. Alshareef; Hongfa Luan; Gennadi Bersuker; Prashant Majhi; Dim Lee Kwong; Byoung Hun Lee

doi:10.1109/LED.2006.876324

Comparison of effective work function extraction methods using capacitance and current measurement techniques

Huang Chun Wen, Rino Choi, George A. Brown, Tim Böscke, Kenneth Matthews, Harlan R. Harris, Kisik Choi, Husam N. Alshareef, Hongfa Luan, Gennadi Bersuker, Prashant Majhi, Dim Lee Kwong, Byoung Hun Lee

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

Original language	English
Pages (from-to)	598-601
Number of pages	4
Journal	IEEE Electron Device Letters
Volume	27
Issue number	7
DOIs	https://doi.org/10.1109/LED.2006.876324
State	Published - Jul 2006
Externally published	Yes

Keywords

Barrier height
High-κ
Metal gate
Work function

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10.1109/LED.2006.876324

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Wen, H. C., Choi, R., Brown, G. A., Böscke, T., Matthews, K., Harris, H. R., Choi, K., Alshareef, H. N., Luan, H., Bersuker, G., Majhi, P., Kwong, D. L., & Lee, B. H. (2006). Comparison of effective work function extraction methods using capacitance and current measurement techniques. IEEE Electron Device Letters, 27(7), 598-601. https://doi.org/10.1109/LED.2006.876324

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abstract = "The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.",

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year = "2006",

month = jul,

doi = "10.1109/LED.2006.876324",

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pages = "598--601",

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AU - Wen, Huang Chun

AU - Choi, Rino

AU - Brown, George A.

AU - Böscke, Tim

AU - Matthews, Kenneth

AU - Harris, Harlan R.

AU - Choi, Kisik

AU - Alshareef, Husam N.

AU - Luan, Hongfa

AU - Bersuker, Gennadi

AU - Majhi, Prashant

AU - Kwong, Dim Lee

AU - Lee, Byoung Hun

PY - 2006/7

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N2 - The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

AB - The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within ± 0.1 eV - in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

KW - Barrier height

KW - High-κ

KW - Metal gate

KW - Work function

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DO - 10.1109/LED.2006.876324

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JF - IEEE Electron Device Letters

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Comparison of effective work function extraction methods using capacitance and current measurement techniques

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Keywords

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