Application of Single-Pulse Charge Pumping Method on Evaluation of Indium Gallium Zinc Oxide Thin-Film Transistors

Manh Cuong Nguyen, An Hoang Thuy Nguyen, Hyungmin Ji, Jonggyu Cheon, Jin Hyun Kim, Kyoung Moon Yu, Seong Yong Cho, Sang Woo Kim, Rino Choi

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

A novel single-pulse charge pumping (SPCP) method was proposed and implemented to profile the density of states (DOSs) in metal-oxide-semiconductor thin-film transistors (TFTs). The proposed SPCP method was demonstrated in characterizing the DOS below the conduction band of indium gallium zinc oxide TFTs. The DOSs, including oxygen vacancy donorlike states and band tail states, were characterized successfully with high resolution. This method has all the advantages of the conventional CP method and single-pulse characterization.

Original languageEnglish
Article number8424088
Pages (from-to)3786-3790
Number of pages5
JournalIEEE Transactions on Electron Devices
Volume65
Issue number9
DOIs
StatePublished - Sep 2018

Bibliographical note

Publisher Copyright:
© 1963-2012 IEEE.

Keywords

  • Band tail
  • charge pumping (CP)
  • conduction band edge
  • density of states (DOSs)
  • indium gallium zinc oxide (IGZO)
  • metal-oxide (MO)-semiconductor
  • oxygen vacancy
  • single pulse
  • thin-film transistor (TFT)
  • trap density
  • trap profiling

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