Aluminum Hydroxide Nano- and Microstructures Fabricated Using Scanning Probe Lithography with KOH Ink

Jehyeok Ryu; Jeong Sik Jo; Jin Hyun Choi; Deuk Young Kim; Jiyoun Kim; Dong Hyuk Park; Jae Won Jang

doi:10.1021/acsomega.3c00038

Aluminum Hydroxide Nano- and Microstructures Fabricated Using Scanning Probe Lithography with KOH Ink

Jehyeok Ryu, Jeong Sik Jo, Jin Hyun Choi, Deuk Young Kim, Jiyoun Kim, Dong Hyuk Park, Jae Won Jang

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

Using scanning probe lithography (SPL) with KOH ink, this study fabricates aluminum hydroxide (Al(OH)₃) nano- and microfeatures on a gold (Au) film that has been deposited on an aluminum (Al) layer. Hydroxyl ions (OH^-) from the KOH ink loaded onto the Au film can react with the underlying Al layer to form Al(OH)₃ structures due to the decrease in the pH of the reacting solution.¹ In this process, Al(OH)₃ solidification is governed by the pH of the KOH ink solution, which is affected by its volume. Suitably small volumes (down to hundreds of attoliters) of the KOH ink solution can be applied to the substrate surface using dip-pen nanolithography (DPN) and polymer-pen lithography (PPL). Using DPN and PPL printing with the solid (i.e., gel) and liquid phases of KOH ink, sub-micron- (minimum ≈300 nm) and micron-sized (≥4 μm) Al(OH)₃ features can be obtained, respectively. The fabrication of Al(OH)₃ structures using the proposed pH-dependent solidification process can be achieved with relatively small volumes in ambient conditions without requiring a previously reported molding process.^1,2

Original language	English
Pages (from-to)	10439-10448
Number of pages	10
Journal	ACS Omega
Volume	8
Issue number	11
DOIs	https://doi.org/10.1021/acsomega.3c00038
State	Published - 21 Mar 2023

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© 2023 The Authors. Published by American Chemical Society.

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@article{e0e39d4e14864ba499ce49083136070a,

title = "Aluminum Hydroxide Nano- and Microstructures Fabricated Using Scanning Probe Lithography with KOH Ink",

abstract = "Using scanning probe lithography (SPL) with KOH ink, this study fabricates aluminum hydroxide (Al(OH)3) nano- and microfeatures on a gold (Au) film that has been deposited on an aluminum (Al) layer. Hydroxyl ions (OH-) from the KOH ink loaded onto the Au film can react with the underlying Al layer to form Al(OH)3 structures due to the decrease in the pH of the reacting solution.1 In this process, Al(OH)3 solidification is governed by the pH of the KOH ink solution, which is affected by its volume. Suitably small volumes (down to hundreds of attoliters) of the KOH ink solution can be applied to the substrate surface using dip-pen nanolithography (DPN) and polymer-pen lithography (PPL). Using DPN and PPL printing with the solid (i.e., gel) and liquid phases of KOH ink, sub-micron- (minimum ≈300 nm) and micron-sized (≥4 μm) Al(OH)3 features can be obtained, respectively. The fabrication of Al(OH)3 structures using the proposed pH-dependent solidification process can be achieved with relatively small volumes in ambient conditions without requiring a previously reported molding process.1,2",

author = "Jehyeok Ryu and Jo, {Jeong Sik} and Choi, {Jin Hyun} and Kim, {Deuk Young} and Jiyoun Kim and Park, {Dong Hyuk} and Jang, {Jae Won}",

note = "Publisher Copyright: {\textcopyright} 2023 The Authors. Published by American Chemical Society.",

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AU - Ryu, Jehyeok

AU - Jo, Jeong Sik

AU - Choi, Jin Hyun

AU - Kim, Deuk Young

AU - Kim, Jiyoun

AU - Park, Dong Hyuk

AU - Jang, Jae Won

PY - 2023/3/21

Y1 - 2023/3/21

N2 - Using scanning probe lithography (SPL) with KOH ink, this study fabricates aluminum hydroxide (Al(OH)3) nano- and microfeatures on a gold (Au) film that has been deposited on an aluminum (Al) layer. Hydroxyl ions (OH-) from the KOH ink loaded onto the Au film can react with the underlying Al layer to form Al(OH)3 structures due to the decrease in the pH of the reacting solution.1 In this process, Al(OH)3 solidification is governed by the pH of the KOH ink solution, which is affected by its volume. Suitably small volumes (down to hundreds of attoliters) of the KOH ink solution can be applied to the substrate surface using dip-pen nanolithography (DPN) and polymer-pen lithography (PPL). Using DPN and PPL printing with the solid (i.e., gel) and liquid phases of KOH ink, sub-micron- (minimum ≈300 nm) and micron-sized (≥4 μm) Al(OH)3 features can be obtained, respectively. The fabrication of Al(OH)3 structures using the proposed pH-dependent solidification process can be achieved with relatively small volumes in ambient conditions without requiring a previously reported molding process.1,2

AB - Using scanning probe lithography (SPL) with KOH ink, this study fabricates aluminum hydroxide (Al(OH)3) nano- and microfeatures on a gold (Au) film that has been deposited on an aluminum (Al) layer. Hydroxyl ions (OH-) from the KOH ink loaded onto the Au film can react with the underlying Al layer to form Al(OH)3 structures due to the decrease in the pH of the reacting solution.1 In this process, Al(OH)3 solidification is governed by the pH of the KOH ink solution, which is affected by its volume. Suitably small volumes (down to hundreds of attoliters) of the KOH ink solution can be applied to the substrate surface using dip-pen nanolithography (DPN) and polymer-pen lithography (PPL). Using DPN and PPL printing with the solid (i.e., gel) and liquid phases of KOH ink, sub-micron- (minimum ≈300 nm) and micron-sized (≥4 μm) Al(OH)3 features can be obtained, respectively. The fabrication of Al(OH)3 structures using the proposed pH-dependent solidification process can be achieved with relatively small volumes in ambient conditions without requiring a previously reported molding process.1,2

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Aluminum Hydroxide Nano- and Microstructures Fabricated Using Scanning Probe Lithography with KOH Ink

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