Aluminum-doped ZnO nanorod array by thermal diffusion process

Aluminum doped ZnO nanorod array was prepared: ZnO nanorod was grown firstly by hydrothermal process and then aluminum was doped by spincoating and thermal treatment. This doping process neither disturbs growth condition of ZnO, nor imposes severe damages. Thus, it is possible to examine the doping effect of aluminum. Changes in the electrical and optical properties were measured as a function of aluminum content. It was found that aluminum doping enhances UV emission and electrical conductivity. This result confirms that N-type doping of aluminum can be accomplished effectively by this process. The doping amount can be controlled just by changing the number of spincoats.